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Semi-conductor


E-Chucks

SEMCO Engineering is a leader in global clamping solutions for OEM’s in the semiconductor or solar industry.
Our electrostatic chucks ( E-chuck; ESC) are widely used in processes such as PVD, CVD, ALD, ION IMPLANT,
METAL and OXIDE ETCH , MEMS and NEMS, or INSPECTION TOOL.
Our know how and 15 years of experience in E-chuck manufacturing allow us to design CAPACITIVE (coulombic) e-chuck
with a optimised THERMAL TRANSFER, and extremely flat TEMPERATURE UNIFORMITY.
All our e-chuck have the capability to be CLEANED or REWORKED in our facilities.
Our R&D team can handle some engineering project with THERMAL AND ELECTRICAL MODELING
for improving the thermal yield of the HEATED/COOLED PEDESTAL where the ESC is mounted.


Spare Parts

Irysolar

Qualiflow Therm