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Semco E-Chucks
Global
Clamping Solutions
OFFICIAL REPAIR
CENTRE FOR NOVELLUS INOVA XT TOOL
In
order to enhance Novellus customer satisfaction,
SEMCO and Novellus have signed since July 2008
a licensee agreement to promote the ESC
refurb program.
NOVELLUS
License
Agreement: SEMCO71508 Date July 15th 2008
Advantage
such as, reduced repair lead-time,
cost saving with the
same quality level
are the main points of this program.
Concerned
Product Span is listed below.
| NVLS PN |
SEMCO PN |
Description |
| 15-269720-00 |
SJ082237 |
ESC
200mm-2 gap Std |
| 15-119766-00 |
|
ESC
200mm-2 gap |
| 15-148764-00 |
SJ082188 |
ESC
200mm-2 gap Hi T-Pink |
| 15-270165-00
Rev C |
J082238-2 |
Double
Gap ESC 300mm-Hi T-Pink |
| 15-270165-00
Rev D |
SJ082331-1 |
Double
Gap ESC 300mm-Hi T-Pink |
| 02-165193-00 |
|
300mm Low E/D Table |
| 02-293830-00 |
|
300mm
Hi E/D Table |
Tel :+ 33 (0) 467 994 747 . Direct
:+ 33 (0) 467 994 624
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