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Overview
Main specifications
Etch Processes
PVD/CVD
Implant & Inspec.
Heated/Cooled
Repair/Rework
Novellus Licensee
Semco E-Chucks
Global Clamping Solutions
300 mm ESC for PVD or Etch
Application
High temperature 300 mm and 200 mm
ESC
for PVD Application
Esc For Solar Cells
200 mm one Gap ESC
4’’ esc for GaAs Etching
for PVD Application