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Semco E-Chucks
Global
Clamping Solutions
SEMCO has also
the capability to design and
manufacture
heater/cooled pedestal and provide OEM with a global solution to control the substrate temperature. High voltage Feedthrough, DC power supply unit, can be provide. ESC may also be built with integrated heater to improve the wafer temperature control. Engineering and Process modeling capabilities allows to design a global clamping solution, from the pedestal to the substrate.
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