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Semco E-Chucks
Global
Clamping Solutions
GET BETTER WITH YOUR PROCESS
TEMPERATURE CONTROL
Our ESC technology offer an extremely large range of operating temperature from cryogenic application up to 600°C with the same E-chuck. Our e-chuck are widely use in thin film deposition for metal (Cu, Ti, Al, Ni, Au, ...) or Oxide deposition, where temperature uniformity and thermal control are key factors.
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