SEMCO has
developed a full range of ESC capable
to cover the entire
temperature
range from cryogenic temperature up to
650°C
Moreover our
ESC offer :
- A
ROBUST DIELECTRIC
MATERIAL -
Hardness =7.0 Mohs
790
Kg/mm² Vickers (HV10) / 850
Kg/mm² Vickers (HV20) / 530 Kg/mm² Knopp (200g)
For
Ref: Diamond
= 10 Mohs Si or Quartz = 7.0 Mohs Glass ≥
4.5 to 6.5 Mohs
Mohs
scale of mineral hardness characterizes the scratch resistance of
various minerals
through the ability of a harder
material to scratch a
softer material.
A HIGH DIELECTRIC STRENGTH : 4.5 kV
Max
operating
recommended voltage : ±
1 kVdc
A LOW
MTTR ( Mean Time To Replace)
|
