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Product Line for OEM Integration
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Manufacturing in Series
Qualified to Worldwide OEMs
Electrostatic Chucks
Customised E-Chucks for PVD, CVD, Deep-Etch, RIE and more application, with Accessories
Gas flow control and Accessories
MFC, MFM, Valves,….
Liquid control and vaporization
MFC, MFM, Valves,….
Complete Gas & Liquid Solutions
Systems and accessoires for OEM Integration
