A real step forward in using furnaces was made possible through automation of the loading and unloading tasks. Since 1986 SEMCO Engineering is providing robotics systems for Semiconductor equipments.   From 3" to 300mm SEMCO has solutions for :    -  Single wafer transfer, pick and place system, using bernoulli effect or E-chuck with scara robot        ex : for very thin wafers    -  Batch transfers, standard equipment with pushers 25/25 or 25*25/50, single or multiple cassettes (up to 12)    -  Scara systems up to 300 mm for transfer 1 to 1, 5 to 5 and 25 to25 (batch transfers)    -  Stockers by process equipments 300mm and Photovoltaic industry    -  Specific Robotics Systems Do not hesitate to ask for our detailled data sheets on these itels and other improvements signed by SEMCO Engineering

ATLAS Boat Loader

The boat loader type ATLAS III is a very compact, ultra smooth, stable and particle free cantilever system. It's designed for use with Atmospheric, Reduced Pressure or LPCVD cantilever system with combination of the SAS Adjustment Table. The ATLAS III is compatible with every brand of furnaces and control system.

4 Boats loaders type ATLAS III with the SAS adjustment table mounted on a load station