Thermco HTR5200

Thermco HTR5200 Horizontal furnace, rebuilt by Semco Engineering.
Left Handed Load Station, TMX Cabinet, and Main Frame.
Right Handed Source Cabinet.  40 inch flat zone.
Configured for 150mm Semiconductor Wafers.
Semco Atlas Boatloaders.  3-Zone Temperature Control.
Power 380V 3-Phase, 50Hz.  Celerity/Unit 8100 MFC’s
Tube 1 & 2:  Atmoscan POCL3 Diffusion with H2, N2, O2, & Lo-O2. 
N2 Purge on Atmoscan.  Trolley.  MRL HC58 Helix II Elements
Heraeus Quartzware included .  External Torches
3-Zone.  Type-B Spike and Profile Thermocouples
Tube 3:  Atmoscan Oxidation with H2, N2, O2, Lo-O2, and Trans-LC.
N2 Purge on Atmoscan.  Trolley.  MRL HC58 Helix II Element
Heraeus Quartzware included.  External Torch
Type-B Spike and Profile Thermocouples
Tube 4:  In-Situ Doped POLY LPCVD with N2, SiH4, SIH4/PH3.
LPCVD Door and Front Vacuum Flange, water cooled.
2” Norton SiC Paddle.  225/235mm Qtz tube with 75/50 BOR.
MRL HC58 Helix II Element .  Type-R Spike and Profile Thermocouples
MKS 653B (ISO-80) throttle valve with 651C controller.
MKS ISO-80 two-stage isolation valve with foreline spool pieces.
MKS 622A & 141AA baratrons.
 
Contact Claude Giral Semco Engineering France or
Christopher Luebker Semco Engineering Lewisville Fab in Texas for information
 

Download : Semco - Thermco 5200 HTR.pdf