The LYDOP® allows your existing system to reach a typical uniformity of 1 %, with an excellent repeatibility and maximized uptime. Add to this a good 33% reduction in chemical comsuption and an throughput going up to 250 wafers per run.
For POCl3, PH3 and BBr3 doping Available up to 200 mm	LYDOP®; is internationally recognized as a valuable source of productivity.

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LYTOX® : Optimized system for thin oxides 

The LYTOX® is a reduced pressure process system and cantilever which eliminates native oxide with uniformity lower than +/- 0.5%. The controlled pressure makes the process independent from the atmospheric pressure and enables better uniformities on wafers and run-to-run

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LYSINTER® SYSTEM - Optimal process system for Pure H2

Pure H2 annealing in a vacuum environment Avoids the use of forming gas which creates undesired charge effects Top safety thanks to a unique combination of hardware safety elements

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