|
Mass
Volume Equipment
for Industry |
 |
|
Robust and large
Horizontal Furnaces
RTP for Back-end Annealing |
|
Transport
Automation
and Robotic |
 |
|
Elevators, Boat Loaders
Single or multiple Wafer Transfer |
|
Versatile
Equipement for R&D and Pilot Line |
 |
|
Small foot-print
Horizontal Furnaces
RTP Systems
SiC Furnace |
|
Reconditioning
and
Retrofit Service |
|
|
Fab – to
– Fab Transfer
Process system retrofit
Automation upgrading
|
|
§Process
Expertise |
 |
|
LPCVD, PECVD,
Diffusion, Annealing, Oxydation Processes
Rapid Thermal Processes
SiC Process
|
