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Since
1986, Semco Engineering is providing smart solutions to the hot wafer
processing industry :
We
offer cost-effective solutions to give new life to your existing
furnace by rebuilding, refurbushing, or upgrading it. we also propose
our own range of state of the art new horizontal furnaces.
SEMCO
engineering supports all conventional Thermal Processes.
Reduced Pressure
SEMCO
has created three innovations on your standard thermal processes.
-
Diffusion POCL3 (Lydop)
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Thin Oxidation (Lytox)
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Pure H2 Annealing ( Lysinter)
Atmospheric
Dry
oxidation - Water steam wet oxidation - Pyrolitic wet oxidation - Metal
alloy - Thermal annealing
Low Pressure CVD
Silicon
nitride, Oxinitride, Rich nitride, Si poly, Alpha poly, Doped poly,
LTO, LTO-PSG, LTO BPSG, TEOS, TEOS-PSG, TEOS BPSG, HTO, SiPOS, PECVD
Different
solutions to improve uniformity, throughput and cost per wafer.
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